Our center being used OLED fabrication equipment system possesses cluster structure.Such an equipment system has been designed and assembled by our technicists & technicists who are in the light of studying and industrial rich experience and integrate advantage of domestic & overseas equipments.The cluster equipment consists of five vacuum chambers, one transfer chamber with mechanical arm(i.e.,integrated control system) and one glove box with both water and oxygen content lowering than 1 ppm which is uesd for OLED device encapsulation. (1)OLED sample was transfered to each chambers by the mechanical arm control each chamber works;(2)this chamber is for clean sample-ITO substrate; (3)for evaporating various organic functionallayers; (4) and (5) chambers are for magnetice spartering of anode electrode also both chambers also own sources for evaporating cathode;the vacuum degree for all chambers is higher than 10-5 pa.

Cluster structure which composites of five vacuum chamber and glove box with lower than 1 ppm.

Electrical controlling system

Glove box without water and oxygen

    By the way,our OLED R/D centrer also possesses attaching equipments; comprehensive luminescent perfomances of OLED device and fims,the measureament system of aging property of OLED devices, and thickness measureament.

Left:synthetical performance tester of OLED ,right: aging property trster of OLED devices

system of  various nanometer thin film( stem profile)